J. Kramer, Feico, San Jose, CA
The Merlin CAD Navigation Application Overview will cover several significant Yield Enhancement and Failure Analysis applications. Yield Enhancement applications to be covered are: (1) Selection of Critical Areas for Inline Review (2) Array Mode for Defect Inspection (3) Via 1 Issues Solved with CAD Overlay (4) Yield Enhancement using LogicMap. In addition, several Classic Failure Analysis applications will also be introduced.