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| Microscopy Tools 1 | ||||
| Location: South Ballroom (Worcester's Centrum Centre) | ||||
| (Please check final room assignments on-site). | ||||
| Session Description: | ||||
| Editors: | Mr. David Vallett IBM Systems and Technology Group, Essex Jct., VT Dr. William Vanderlinde Laboratory for Physical Sciences, College Park, MD | |||
| Session Chairs: | Mr. Tracy Myers ON Semiconductor, Gresham, OR Dr. JoAn Hudson University of Oregon, Eugene, OR | |||
| 8:15 AM | Optical and Infrared FA Microscopy | |||
| 9:15 AM | Scanning Electron Microscopy (SEM) | |||
| 10:30 AM | Break | |||
| 10:45 AM | The Role of the AFM in Failure and Yield Analysis | |||
| 11:30 AM | The Role of the AFM in Failure and Yield Analysis II | |||