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| Sample Preparation | ||||
| Location: Meeting Room C/D (Worcester's Centrum Centre) | ||||
| (Please check final room assignments on-site). | ||||
| Session Description: | ||||
| Editors: | Mr. David Vallett IBM Systems and Technology Group, Essex Jct., VT Dr. William Vanderlinde Laboratory for Physical Sciences, College Park, MD | |||
| Session Chairs: | Dr. Cosme Furlong Worcester Polytechnic Institute, WPI, Worcester, MA Mr. Kendall Scott Wills Independent Consultant, Sugar Land, TX | |||
| 12:15 PM | Lunch | |||
| 1:15 PM | Chip Access Techniques | |||
| 2:15 PM | Delayering Techniques: Dry Process, Wet Chemical, Parallel Lapping | |||
| 3:30 PM | Break | |||