Many materials and fabrication processes are used to manufacture microelectromechanical systems (MEMS). Some MEMS fabrication processes such as the MUMPS (Multi-User MEMS Process) and SUMMiT (Sandia's Ultra-planar Multi-Level MEMS Technology) are fabricated using polysilicon, whereas the Digital Micromirror Device (DMD) used in Texas Instruments' DLP is fabricated using thin film aluminum over integrated circuitry. Although many MEMS components are fabricated using these materials, many other materials systems are entering the market or are in development for specific applications. Materials such as polymers, diamond or diamond-like carbon, and silicon carbide are just a few materials being used to develop MEMS technology. This presentation will introduce various MEMS materials systems, MEMS fabrication processes, and a brief discussion regarding the benefits and challenges of each materials system.