|
||||
| Back to "Tutorial" Search | Back to Main Search | |||
| MEMS | ||||
| Location: Meeting Room J1 (San Jose McEnery Convention Center) | ||||
| (Please check final room assignments on-site). | ||||
| Session Description: The purpose of this session is to introduce the attendee to the various technical aspects of microelectromechanical systems (MEMS) technology. In this session, will discuss the different materials and fabrication processes used create MEMS devices as well as various optoelectronic non-invasive techniques used to analyze MEMS. We will end with a discussion on the reliability, analysis, and qualification of the digital micromirror device (DMD) fabricated by Texas Instruments for their digital light processing (DLP) projector systems. | ||||
| Editor: | Mr. Jeremy A. Walraven Sandia National Labs, Albuquerque, NM | |||
| Session Chair: | Mr. Jeremy A. Walraven Sandia National Labs, Albuquerque, NM | |||
| 8:00 AM | GEN0515.1 | Introduction to Microelectromechanical Systems (MEMS) Materials and Fabrication Processes | ||
| 9:00 AM | GEN0515.2 | Optoelectronic Techniques for MEMS and Electronic Packaging Characterization | ||
| 10:00 AM | Break | |||
| 10:15 AM | GEN0515.3 | MEMS Development: A DMD Case Study | ||