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Sunday, November 6, 2005 - 3:45 PM
GEN055.3

Focused Ion Beam - A Sample Preparation Tool (New for 2005)

K. (. Hooghan, FEI KAUST, Saudi Arabia

In the past decade and a half, Focused Ion Beam systems (FIB) have revolutionized sample preparation in the Microelectronics Characterization and Failure Analysis domain. With submicron accuracy and stress free cross-sections in hard to reach areas, FIB systems have become an indispensable tool in this regard. This tutorial will focus on sample preparation for Scanning and Transmission electron microscopy (SEM/TEM), used for Microelectronics Characterization and Failure Analysis. Different strategies to prepare TEM samples using various Lift-out techniques will be discussed, giving the user a broad perspective to make a choice on which tools are available, and make an educated choice in that regard. Materials covered will include Silicon based IC's as well as exotic materials.