ISTFA Home
Exposition
To Register
ASM Homepage
Back to "Session 17: Optical Techniques 2" Search
Back to "Symposium" Search
Back to Main Search
Thursday, November 10, 2005 - 8:00 AM
SYMP0518.1
Advanced Optical Testing of an Array in 65 nm CMOS Technology
F. Stellari, IBM Research, Yorktown Heights, NY; P. Song, IBM, Yorktown Heights, NY; T. A. Christensen, IBM, ROCHESTER, MN
View in PDF format