Failure Analysis of Soft Single Column Failure in Advanced 90nm SRAM Device with Internal Probing Techniques
H. S. Lin, W. T. Chang, C. H. Chao, C. T. Lin, J. Wang, UMC, Hsin-Chu City, Taiwan; C. Lin, No.3 Li-Hsin Rd. II , Science-Based Industrial Park, Hsin-Chu City,Taiwan 300, R.O.C., Hsin-CHu,Taiwan, Taiwan
