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Thursday, November 10, 2005 - 1:00 PM
SYMP0521.1

Development of High Accuracy Automatic Magnification Calibration Function for Scanning Transmission Electron Microscope

H. Inada, D. Terauchi, A. Takane, S. Aizawa, H. Tanaka, Hitachi High-Technologies Corporation, Hitachinaka, Japan; R. Tsuneta, R. Tsuneta, K. Nakamura, Hitachi Ltd., Kokubunji, Japan; M. Konno, M. Ozawa, Hitachi Science Systems, Hitachinaka, Japan

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