Development of High Accuracy Automatic Magnification Calibration Function for Scanning Transmission Electron Microscope
H. Inada, D. Terauchi, A. Takane, S. Aizawa, H. Tanaka, Hitachi High-Technologies Corporation, Hitachinaka, Japan; R. Tsuneta, R. Tsuneta, K. Nakamura, Hitachi Ltd., Kokubunji, Japan; M. Konno, M. Ozawa, Hitachi Science Systems, Hitachinaka, Japan
