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Thursday, November 10, 2005 - 8:50 AM
SYMP0517.4

3D Observation of Elemental Distribution of Si-Device using a Dedicated FIB/STEM System

T. Yaguchi, M. Konno, T. Kamino, M. Ogasawara, Hitachi High-Technologies corporation, Hitachinaka-shi, Japan; K. Kaji, T. Ohnishi, Hitachi High-Technologies Corporation, hitachinaka, Japan; M. Watanabe, Lehigh University, Bethlehem, PA

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