3D Observation of Elemental Distribution of Si-Device using a Dedicated FIB/STEM System
T. Yaguchi, M. Konno, T. Kamino, M. Ogasawara, Hitachi High-Technologies corporation, Hitachinaka-shi, Japan; K. Kaji, T. Ohnishi, Hitachi High-Technologies Corporation, hitachinaka, Japan; M. Watanabe, Lehigh University, Bethlehem, PA
