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Thursday, November 10, 2005 - 2:40 PM
SYMP0521.5
An Overview of 300 mm SOI Starting Wafer Quality and Its Yield Detractors
P. Y. Tsai, J. Lee, P. Ronsheim, L. Burns, R. Murphy, M. Almonte, G. Pfeiffer, R. Kleinhenz, M. Guse, IBM, Hopewell Junction, NY; H. Hovel, D. Sadana, IBM, Yorktown Height, NY
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