In-line High-Resistance Tungsten Plug Defect Monitoring with an Advanced E-Beam System
H. Xiao, Hermes Microvision, Inc., San Jose, CA; M. Tsai, H. Liu, J. H. Yeh, S. Lin, K. Wang, S. C. Lei, United Microelectronics Corp, Tainan County, Taiwan; J. Jau, Hermes Microvision, Taiwan; W. Y. Wu, H. C. Wu, Hermes Systems, Hsinchu, Taiwan
