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Thursday, November 10, 2005 - 1:50 PM
SYMP0521.3

In-line High-Resistance Tungsten Plug Defect Monitoring with an Advanced E-Beam System

H. Xiao, Hermes Microvision, Inc., San Jose, CA; M. Tsai, H. Liu, J. H. Yeh, S. Lin, K. Wang, S. C. Lei, United Microelectronics Corp, Tainan County, Taiwan; J. Jau, Hermes Microvision, Taiwan; W. Y. Wu, H. C. Wu, Hermes Systems, Hsinchu, Taiwan

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