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Wednesday, November 9, 2005
SYMP0512.18

The Enhancement of Abnormal Photon Emission Identification for Advanced Processes Using a Backside Cooling PEM System

C. H. Wang, S. W. Lai, Z. H. Lee, Taiwan Semiconductor Manufacture Company, Ltd., Taiwan, Tainan, Taiwan; J. H. Chou, Taiwan Semiconductor Manufacture Company, Ltd., Taiwan, Shan-Hua Tainan, Taiwan

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