The Study and Methodology of Defects Isolation For Contacts of Non-Isolated Active Region on New Logic Designs
C. H. Wang, C. M. Shen, C. J. Lin, Z. H. Lee, Taiwan Semiconductor Manufacture Company, Ltd., Taiwan, Tainan, Taiwan; J. H. Chou, Taiwan Semiconductor Manufacture Company, Ltd., Taiwan, Shan-Hua Tainan, Taiwan
