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Thursday, November 10, 2005 - 10:15 AM
SYMP0519.4
In-Line Voltage Contrast Inspection of Ungrounded Chain Test Structures for Timely and Detailed Characterization of Contact and Via Yield Loss
O. D. Patterson, H. Wildman, A. Ache, IBM Corporation, Hopewell Junction, NY; K. Wu, KLA-Tencor, Hopewell Junction, NY
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