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Tuesday, November 8, 2005 - 3:25 PM
SYMP057.4
Novel and Practical Method of Through Silicon FIB Editing of SOI Devices
R. K. Jain, M. E. Antolik, M. A. Thompson, Credence Systems Corporation, Sunnyvale, CA; T. R. Lundquist, DCG Systems, Inc, Freemont, CA
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