R. Rosenkranz, S. Doering, W. Werner, Qimonda Dresden GmbH & Co. OHG, Dresden, Germany; S. Eckl, Infineon Technologies Dresden GmbH & Co. OHG, Dresden, Germany; L. Bartholomaeus, Qimonda AG, Munich, Germany

Summary: Active Voltage Contrast technique is demonstrated in a SEM/FIB system applied to contact chain test structures. It is shown that AVC enhances SEM/FIB voltage contrast to a level that enables localizing a much broader spectrum of defects.