H. Preu, W. Mack, T. Kilger, B. Seidl, M. Kirchberger, Infineon Technologies AG, Regensburg, Germany; P. Alpern, Infineon Technologies AG, Neubiberg, Germany

Summary: In this case study we present a successful approach for failure analysis of a diode leakage. An analytical flow will be introduced, which contains standard techniques as well as SQUID (superconducting quantum interference device) scanning magnetic microscopy and ToF-SIMS as key methods for localization and root cause identification.