R. K. Jain, T. Malik, T. Lundquist, C. C. Tsao, Credence Systems Corporation, Sunnyvale, CA; W. Walecki, Frontier Semiconductor, Inc, San Jose, CA

Summary: Advanced Fringe analysis techniques in circuit edit are discussed using a coaxial photon-ion column. Emphasis is put on accurate end point detection and maintaining co-planarity in new technology circuit edit for higher success rate.