W. K. Wong, M. Palaniapan, C. L. Wong, S. Wang, F. E. Tay, National University of Singapore, Singapore, Singapore

Summary: This paper describes an acoustic phonon-based characterization technique as a novel alternative tool for the characterization of dynamic microelectromechanical (MEMS) devices such as MEMS resonators, switches, micromirrors, accelerometers and gyroscopes. The technique intrinsically features high throughput and non-invasive characterization due to the favorable transmission properties of acoustic phonons through solids, which facilitates high volume wafer and package level testing. The dependence of phonon generation on material properties yields information not commonly obtained in existing electrical, optical and electron beam testing techniques such as contact tribology, energy dissipation, non-linear device response and device resonance modes. Present case study results show that phonon-based characterization not only provides efficient, non-destructive testing (NDT) of basic MEMS functionality but also insights into MEMS device lifecycle behavior.