T. C. Chuang, J. H. Chou, Taiwan Semiconductor Manufacture Company, Ltd., Tainan, Taiwan; C. M. Shen, Taiwan Semiconductor Manufacture Company, Ltd., Taiwan, Hsin-Chu, Taiwan

Summary: According to our research, the thermal budget induced abnormal dopant distribution and lower concentration per centimeter third were revealed and feedback to Fab. The flash lamp annealing failure mode has been improved since then. No similar faulty has been observed thereafter.