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Wednesday, November 15, 2006 - 4:45 PM

Focused Ion Beam Grounding to Alleviate Sample Charging for Scanning Auger Electron Spectroscopy

E. Morales, C. F. H. Gondran, ATDF at International SEMATECH, Austin, TX

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Summary: we describe the application of the FIB spot mill grounding technique to sample preparation for AES. This is a quick, clean, and effective method to avoid charge buildup on samples requiring AES analysis.