V. V. Makarov, Tiza Lab, LLC, Milpitas, CA; N. Antoniou, Credence Systems Corp., Sunnyvale, CA

Summary: The ability to edit circuitry in silicon quickly and confidently is extremely valuable as it permits verification of design changes or fixes without the need to generate new reticles and fabricate new silicon. The ability to extend this capability into the future requires the development of circuit edit (CE) processes that scale with the semiconductor technology and are material independent.