M. W. Jenkins, P. Tangyunyong, J. M. Soden, J. A. Walraven, A. A. Pimentel, Sandia National Labs, Albuquerque, NM; E. I. Cole Jr., Sandia National laboratories, Albuquerque, NM

Summary: Floating substrate passive voltage contrast (FSPVC), like conventional PVC, locates the transistor gates responsible for light emission with much finer resolution than light emission alone and does not require the ground path needed with conventional PVC. Therefore, sample deprocessing/preparation is simplified and the PVC approach can be applied to SOI technologies.