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Session 14: Advanced Techniques 2
Location: Ballroom A (Renaissance Austin Hotel)
(Please check final room assignments on-site).
Session Description: The second session features e-beam probing in backside FIB trenches, adaptation of a solid immersion lens for thermal imaging, indirect ESD stressing, a new planar deprocessing method, and an advanced reverse engineering process.

Editor:Rajen Dias Intel Corporation, Chandler, AZ
Session Chairs:Dr. Rajen Dias Intel Corporation, Chandler, AZ
Dr. Benaiah D. Schrag Micro Magnetics, Inc., Fall River, MA
9:55 AMFunctional IC Analysis through Chip Backside with Nano Scale Resolution - E-Beam Probing in FIB Trenches to STI Level
10:20 AMUse of a Solid Immersion Lens for Thermal IR Imaging
10:45 AMIndirect Electrostatic Discharge Stressing Mechanism in VLSI Chips with Multiple Power Supply Domains
11:10 AMPlanar Deprocessing of Advanced VLSI Devices
11:35 AMAn Advanced Integrated Circuit Analysis System