C. M. Shen, Taiwan Semiconductor Manufacture Company, Ltd., Taiwan, Hsin-Chu, Taiwan; T. C. Chuang, S. C. Lin, C. M. Huang, L. F. Wen, Taiwan Semiconductor Manufacture Company, Ltd., Tainan, Taiwan

Summary: The utilization of Nano-probing could acquire detailed electrical data, and the reasoned simulation by various mathematic models would imitate all the significant failure characteristics. So the defect mode could be identified out even when the general PFA could not be implemented for several non-visual defect modes.