T. K. Lee, T. S. Back, J. H. Kim, Y. B. Park, H. J. Kim, S. Y. Lee, Hynix Semiconductor Inc, Icheon-si, South Korea

Summary: In this study, we demonstrated and evaluated that micro-cleaving and FIB milling are applicable to prepare cross-sectional sample of specific site for SCM observation. It is found that both techniques show good SCM results and are applicable to preparing cross-sectional sample of specific site for SCM investigation.