C. Brillert, Z. Qian, C. Burmer, Infineon Technologies AG, Munich, Germany

Summary: New developments concerning lock-in phase and an advanced spectral analysis technique applied to accessible IC signals is introduced in detail. The techniques combine the thermal laser stimulation (TLS) with high sensitivity of lock-in technique or frequency spectrum analyzer to phase signal. The difference to other lock-in techniques utilizing pulsed lasers is exemplary pointed out. Moreover the application to phase related soft-defects and to a design related jitter problem is shown. The power of such techniques for direct mapping a phase jitter path is shown. Further benefits of lock-in phase methodology and spectral analysis technique applied to 65 nm and 90 nm technology is presented and illustrated using different case studies.