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Wednesday, November 7, 2007 - 12:00 PM
Applications of Electron Tomography on Advanced DRAM
J. S. Luo, J. D. Russell, L. Y. Huang, T. P. Chen, Inotera Memories, Inc., Taoyuan, Taiwan
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Summary:
This abstract demonstrates the technique of TEM tomography on real FA cases in DRAM technology
