C. M. Shen, Taiwan Semiconductor Manufacture Company, Ltd., Taiwan, Hsin-Chu, Taiwan; T. C. Chuang, L. F. Wen, S. C. Lin, C. M. Huang, Taiwan Semiconductor Manufacture Company, Ltd., Tainan, Taiwan

Summary: This paper is to present a composite methodology to overcome the special failure in RF integrated circuit, which cannot be localized by general failure analysis method or instrumentation directly.