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Tuesday, November 6, 2007 - 2:20 PM

Sub-Zeptofarad Sensitivity Scanning Capacitance Microscopy Sensor

H. Dongmo, P. Hammond, J. Weaver, University of Glasgow, Glasgow, United Kingdom

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Summary: We describe A 3 GHz sensor for SCM with sub-zeptofarad sensitivity. The sensor is based on the designs of Tran et al. PCB Prototype is being used as a test bed and the first step towards a single-chip SiGe BiCMOS SCM presently being developed at the James Watt Nanofabrication Centre (JWNC) of the University of Glasgow.