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| Session 3: SPM Techniques | ||||
| Location: Meeting Room J3 (San Jose McEnery Convention Center) | ||||
| (Please check final room assignments on-site). | ||||
| Session Description: | ||||
| Session Chairs: | Mr. Jim Colvin FA Instruments, San Jose, CA Dr. Rama Goruganthu AMD, Sunnyvale, CA | |||
| 1:30 PM | Challenges of Atomic Force Probe Characterization of Logic Based Embedded DRAM for On-Processor Applications | |||
| 1:55 PM | Alternating Plane-View and Cross-Section Scanning Capacitance Microscope Technique to Reveal Various Implant Issue | |||
| 2:20 PM | Sub-Zeptofarad Sensitivity Scanning Capacitance Microscopy Sensor | |||