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Session 3: SPM Techniques
Location: Meeting Room J3 (San Jose McEnery Convention Center)
(Please check final room assignments on-site).
Session Description:

Session Chairs:Mr. Jim Colvin FA Instruments, San Jose, CA
Dr. Rama Goruganthu AMD, Sunnyvale, CA
1:30 PMChallenges of Atomic Force Probe Characterization of Logic Based Embedded DRAM for On-Processor Applications
1:55 PMAlternating Plane-View and Cross-Section Scanning Capacitance Microscope Technique to Reveal Various Implant Issue
2:20 PMSub-Zeptofarad Sensitivity Scanning Capacitance Microscopy Sensor