V. Chowdhury, C. Hsu, A. Yu, Altera Corp., San Jose, CA

Summary: Subtle read disturb failures seen on several lots and products had a pattern specific failure. A thorough layout analysis followed by nanoprobing confirmed the failure to be specific to certain transitors with a poor performance. The uniqueness of the layout made the failing rows and columns more vulnerable to this failure. A correlation done with the impact lots confirmed the failures due to a bad tool. The column and row failures were ascribed to blocked NLDD and pocket implant