R. Rosenkranz, W. Werner, Qimonda Dresden GmbH & Co. OHG, Dresden, Germany; J. Tejero, Qimonda Dresden GmbH & Co. OHG, Dresden, CO, Germany
The Voltage Contrast localization methods became widely accepted in the semiconductor failure analysis community during the last decade and nearly all labs make use of it. Nevertheless, there is a lack of a comprehensive overview over all phenomena related to this subject. The multiple advantages, possibilities and limits of VC failure localization are systemized and discussed.