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MEMS Devices
Location: Meeting Room J3 (San Jose McEnery Convention Center)
(Please check final room assignments on-site).
Session Description:

Session Chair:Mr. Jeremy A. Walraven Sandia National Labs, Albuquerque, NM
11:15 AMIntroduction to Microelectromechanical Systems (MEMS) Materials and Fabrication Processes
12:00 PMBreak
1:00 PMIntroduction to and Reliability in MEMS Packaging
2:00 PMOptoelectronic Techniques for MEMS and Electronic Packaging Characterization