The 35th International Symposium for Testing and Failure Analysis (November 15-19, 2009) of ASM
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Wednesday, November 18, 2009 - 8:25 AM

Deterministic Polishing Applications In Failure Analysis

M. E. Kimball, Maxim Integrated Products, Inc., Hillsboro, OR

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Summary: The paper shows how deterministic polishing (a technique taken from the optics industry) can be used to improve surface polishing. Computer simulations of the polishing process were used to help optimize the polishing results. The simulation results also showed how "standard" polishing approaches can be improved.