K. L. Lin, Inotera Memories Inc., Taoyuan, Taiwan, Taoyuan, Taiwan; J. S. Luo, J. D. Russell, Inotera Memories, Inc., Taoyuan, Taiwan

Summary: A novel micro-brush method to cover a defect with a micro-layer on the target’s surface using a micromanipulator of a plucking system has been introduced and successfully applied in the application of surface defect analysis without any damage or localization problem. Various sizes of micro-brushes, ranged between 10 and 330 ìm, were chosen to deal with different sizes of surface defects. The micro-brush method can be used for both in-film and on-surface defects.