The 35th International Symposium for Testing and Failure Analysis (November 15-19, 2009) of ASM
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Wednesday, November 18, 2009

Evaluation Trial of MEMS Devices by LSI Process Diagnostics

W. Shimizu, Oki Engineering Co., LTD., Tokyo, Japan

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Summary: We have advocated "LSI Process Diagnostics system" as a technique detecting the danger element that can cause the breakdown of LSI beforehand. This time, we describe the modification of "LSI Process Diagnostics system" for the MEMS device and evaluation results.