P. Scholz, U. Kerst, C. Boit, Berlin University of Technology, Berlin, Germany; C. C. Tsao, T. Lundquist, DCG Systems, Fremont, CA

Summary: Solid immersion lenses (SILs) are a promising solution when resolution enhancement for backside analysis of semiconductor devices is needed. This work presents a way of creating refractive SILs within a short processing time in the bulk material and also the ability to remove them for a further analysis of the same area of the sample. This way the advantages of SILs placed on the surface and created in the bulk material with FIB can be combined.