The 35th International Symposium for Testing and Failure Analysis (November 15-19, 2009) of ASM
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Tuesday, November 17, 2009 - 3:10 PM

Backside IR Raman Temperature Measurements

R. A. Falk, Quantum Focus Instruments, Tukwila, WA; T. Pham, Quantum Focus Instruments, OptoMetrix Division, Tukwila, WA

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Summary: Describes Raman temperature measurement through silicon backside