T. Sun, G. L. Woods, C. Li, Y. Zhang, K. Kelly, M. F. Duarte , Rice University, Houston, TX

Summary: Laser-based failure-analysis techniques such as optical beam-induced current (OBIC) or optical beam-induced resistance change (OBIRCH) involve scanning a focused laser beam across a sample by means of a laser scanning microscope (LSM). In this paper, we demonstrate a new method of obtaining the same data without requiring a laser or an LSM. Instead, we employ new techniques from the field of compressive sensing (CS). We use an incoherent light source and a spatial light modulator in an image plane of the device under test, supplying a series of pseudo-random on/off illumination patterns (structured illumination) and recording the resulting electrical signals. Advanced algorithms allow us to reconstruct the signal for the entire die. Using CS techniques leads to advantages in throughput and potential reductions in system complexity. We present results from OBIC measurements on a damaged device and discuss extensions to other techniques such as OBIRCH and also optical emission.