35th International Symposium for Testing and Failure Analysis (November 15-19, 2009): Electrical Characterization of Different Failure Modes in Sub-100 Nm Devices Using Nanoprobing Technique

Electrical Characterization of Different Failure Modes in Sub-100 Nm Devices Using Nanoprobing Technique

Tuesday, November 17, 2009: 2:20 PM
Meeting Room J3 (San Jose McEnery Convention Center)
Mr. Erwin Hendarto , Chartered Semiconductor Manufacturing Pte. Ltd., Singapore, Singapore
Suey Li Toh , Chartered Semiconductor Manufacturing Pte. Ltd., Singapore, Singapore
John Sudijono , Chartered Semiconductor Manufacturing Pte. Ltd., Singapore, Singapore
Pik Kee Tan , Chartered Semiconductor Manufacturing Pte. Ltd., Singapore, Singapore
Hao Tan , Chartered Semiconductor Manufacturing Pte. Ltd., Singapore, Singapore
Yeow Whatt Goh , Chartered Semiconductor Manufacturing Pte. Ltd., Singapore, Singapore
Ling Zhu , Chartered Semiconductor Manufacturing Pte. Ltd., Singapore, Singapore
Qin Deng , Chartered Semiconductor Manufacturing Pte. Ltd., Singapore, Singapore
Hongbo Lin , Chartered Semiconductor Manufacturing Pte. Ltd., Singapore, Singapore
Ran He , Chartered Semiconductor Manufacturing Pte. Ltd., Singapore, Singapore
Hongliang Li , Chartered Semiconductor Manufacturing Pte. Ltd., Singapore, Singapore
Zhihong Mai , Chartered Semiconductor Manufacturing Pte. Ltd., Singapore, Singapore
Jeffrey Lam , Chartered Semiconductor Manufacturing Pte. Ltd., Singapore, Singapore
See more of: Session 3: Nanoprobing
See more of: Symposium