35th International Symposium for Testing and Failure Analysis (November 15-19, 2009): A Versatile Design of Solid Immersion Lenses in Bulk Silicon Using Focused Ion Beam Techniques

A Versatile Design of Solid Immersion Lenses in Bulk Silicon Using Focused Ion Beam Techniques

Wednesday, November 18, 2009: 9:15 AM
Meeting Room J1-J2 (San Jose McEnery Convention Center)
Mr. Philipp Scholz , Berlin University of Technology, Berlin, Germany
Uwe Kerst , Berlin University of Technology, Berlin, Germany
Christian Boit , Berlin University of Technology, Berlin, Germany
Chun-Cheng Tsao , DCG Systems, Fremont, CA
Ted Lundquist , DCG Systems, Fremont, CA
See more of: Session 4: Circuit-Edit
See more of: Symposium