35th International Symposium for Testing and Failure Analysis (November 15-19, 2009): Novel Dielectric Etch Chemistry for the Next Generation of Circuit Edit: Delicate to Low-k Dielectrics and Silicon

Novel Dielectric Etch Chemistry for the Next Generation of Circuit Edit: Delicate to Low-k Dielectrics and Silicon

Wednesday, November 18, 2009: 8:50 AM

Meeting Room J1-J2 (San Jose McEnery Convention Center)

Dr. Vladimir V. Makarov , Tiza Lab, LLC, Milpitas, CA

Leo Krasnobayev , Tiza Lab, LLC, Milpitas, CA

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