35th International Symposium for Testing and Failure Analysis (November 15-19, 2009): Nanoprobe Capacitance-Voltage Spectroscopy (NCVS) Localization of 45nm SOI SRAM Array Bit Line Failure

Nanoprobe Capacitance-Voltage Spectroscopy (NCVS) Localization of 45nm SOI SRAM Array Bit Line Failure

Tuesday, November 17, 2009: 1:30 PM

Meeting Room J3 (San Jose McEnery Convention Center)

Mr. Terence Kane , IBM, Hopewell Junction, NY

Michael P Tenney , IBM, Hopewell Junction, NY

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