J. J. Demarest, IBM, Albany, NY

Summary: Energy-dispersive spectrometry (EDS) has been a long established technique for transmission electron microscopy (TEM). This technique has been a workhorse in failure analysis for years providing specific elemental information to identify materials and their compositions. Thus EDS is a key analytical tool for aiding in root cause determination. The fundamental physics of EDS have been well documented and described in a number of texts. This paper looks at a number of TEM microscopes currently in use in various facilities with the goal of evaluating commercially available TEM platforms with respect to EDS signal. Preliminary data from three microscopes are included in this abstract.