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Tuesday, November 16, 2010 - 1:20 PM
3.1

Volume Electrical Failure Analysis for Product-Specific Yield Ramp

S. Kasapi, J. Liao, B. Cory, NVIDIA, Santa Clara, CA; I. Kapilevich, R. Portune, Y. S. Ng, C. Kardach, DCG Systems, Fremont, CA; E. Cheng, Spirox, Hsinchu, Taiwan

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Summary: Yield on specific designs often falls far short of the yield predicted from foundry test vehicles, especially in new technology nodes. Improving yield on specific product wafers is an expensive and time-consuming problem. We present a workflow to integrate a limited set of electrical failure analysis (EFA) techniques to improve the speed and efficiency of product-specific yield ramp.