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Session 2: FA Process/Case Studies
Location: Malachite Showroom (InterContinental Hotel Dallas)
(Please check final room assignments on-site).
Session Description:

Session Chairs:Rose Ring SMSC Austin, Austin, TX
Dr. Leo G. Henry ESD-TLP Consulting & Testing, Fremont,, CA
1:20 PMVolume Electrical Failure Analysis for Product-Specific Yield Ramp
1:45 PMCase Study in Fault Isolation of a Metal Short for Yield Enhancement
2:10 PMInter Layer Dielectric Defect Induce High Contact Resistance
2:35 PMFailure Analysis Methodology On Systematic Defect in ADC_PLL Ring Pattern Due to Plasma De-Chuck Process
3:00 PMFault Isolation of Sub-Surface Lakage Defects Using Electron Beam Induced Current Characterization in Next-Generation Flash Memory Technology Development
3:25 PMA Case Study: Observation of Counter Doping of Gate Poly and Its Validation in High Density 90nm CMOS SRAM Bitcell