High Volume and Fast Turn around Automated In-Line TEM Sample Preparation for Manufacturing Process Monitoring
C. H. H. Kang, J. F. King, O. D. Patterson, S. B. Herschbein, IBM Systems & Technology, Hopewell Junction, NY; J. P. Nadeau, S. E. Fuller, FEI Company, Hillsboro, OR
Summary: This paper will introduce the TEM sample preparation method for process monitoring by high volume very fast turn around time technique in manufacturing environment.
