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24.6 Studies of Buried Voids Capturing with e-Beam Inspection System and Confirming with Physical Failure Analysis

Wednesday, November 14, 2012
West Hall 1 (Phoenix Convention Center)
Dr. Hong Xiao , KLA-Tencor Corp., Milpitas, CA
Ximan Jiang , KLA-Tencor Corp., Milpitas, CA
See more of: Session 24: Exhibitor Dessert Reception and Poster Session
See more of: Symposium